Design and fabrication of a LIGA-fabricated microvalve for drug delivery applications

摘要

In this paper, we will describe the design and development of a normally closed, low power microvalve for drug delivery applications. This microvalve is fabricated using a modified LIGA technique. Multiple, precision, off-axis X-ray exposures ofPMMA resist are used to define a tapered valve seat and plunger. The final valve assembly consists of hybrid components of a bulk micromachined Si membrane, conventionally machined channels and LIGA-defined valve seats and plungers. An external microelectromagnet was used to control plunger displacement, thereby providing flow control. Total size of the entire valve, including the actuator, is 8×8×10 mm. This represents a very conservative attempt at miniaturization. The next-generation design will be scaled down by at least one half with minimal modifications to the current process.