Multielemental analysis of evaporated liquid samples is possible by irradiating the samples with a 16 MeV ~7Li beam and detecting the elastically scattered ions at 28 deg. The method is easily applied when Rutherford scattering dominates. To rpepare the tartets, the liquid sample concentration, uniformity and spectrum energy resolution. Details on the spectrum analysis will be given. The method is mainly useful for multielemental quantification in the low mass region from lithium to fluorine were standard techniques such as PIXE and TXRF are useless.
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