Sputter-initiated resonance ionization spectroscopy at the university of North Texas

摘要

Sputter-initiated resonance ionization spectroscopy (SIRIS), a ghighly sensitive surface analysis technique that incorporates a primary sputtering ion beam and a tunable laer system to selectively ionize sputtered neutral components, has recently been added to the array of characterization methods available at the University of North Texas (UNT). An overview of the UNT SIRIS system is given, and several of the system components and features developed at UNT are described, including optics of the primary beam and associated diagnostics, target handling, laser beam optics and diagnostics, the detector for the sputtered particles, and the fast pulse triggering scheme for time-of-flight measurements.