Novel anlaysis techniques using cluster ion beams

摘要

Ion beams are used intensively for analytical apprlications. In order to meet the demands of the recent tremarkable proogress in mateirla science, new ion beam analysis techniques based on large gaseous cluster ion beams are proposed. Cluster ion beams, which provide an equivalent low energy beam, offer many advantages for analytical technique. For instance, sputtering yields of the cluster ions are one or two order of magnitude higher than monomer ions and smotthm flat surfaces can be maintained during the sputter dept profiling with cluster ions. These advantages are the results of multiple-collision and high local densityenergy deposition of cluster ions. Gaseous clusters such as argon or oxygen, as utilized in the analysis are generated by supersonic expansion. The beam current of the cluster ions is a few mu A which is sufficient for most analyses.