Toward extended range sub-micron Conoscopic Holographyprofilometers, using multiple wavelengths and phasemeasurement

摘要

Conoscopic Holography proved to be a very adequate solution for in-situ optical measurement in industrialinspection and quality control systems, offering high-precision with a wide range of standoff distances, whilebeing quite insensitive to the harsh environmental conditions often encountered in industry, as it is a common-path technique.