INSTRUMENT MEASUREMENT OF CONTAMINATION IN CLEAN ROOMS FOR PROPOSED FEDERAL STANDARD NO. 209

摘要

Proposed Federal Standard No. 209 specifies the maximum permissible number and sizes of particles in the air of "clean rooms". It is designed to improve the reliability of componeits manufactured by Government Contractors. Data are given on the particle size distribution in the atmosphere and on the meaning of particle "size" as measured by a photoelectric particle counter. Reliability is also a necessary feature of instruments for monitoring clean rooms.