Microsyst. Technol. Center, Ind. Technol. Res. Inst., Tainan, Taiwan;
calibration; capacitive sensors; force measurement; force sensors; industrial robots; microfabrication; microrobots; microsensors; readout electronics; robotic assembly; tactile sensors; MEMS membrane; assembly; axis effect; industrial robot; miniature triaxial tactile sensor; normal force detection; polymer bump; readout circuit calibration; sensing electrodes; shear force detection; touch sensor; tri-axial capacitive tactile sensor; wavelength 760 mum; wavelength 950 mum; Electrodes; Force; Polymers; Sensitivity; Tactile;
机译:具有集成读出电路和过程变化补偿的CMOS微加工电容式触觉传感器
机译:基于电容式化学传感器的柔性传感器系统,集成了在超薄基板上完全制造的读出电路
机译:基于压电弹性体的动态三轴力测量柔性触觉传感器
机译:具有CalibrataTele读数电路的微型三轴触觉传感器
机译:Quanta图像传感器的读数电路
机译:基于应变分布的三轴力表形触觉传感器
机译:Delta-Sigma调制传感器接口电路,具有改进的电容读出化学传感器的转换增益