Local growth of carbon nanotubes by thermal chemical vapor deposition from iron based precursor nanoparticles

摘要

We present a study on selective deposition of two types of iron nanoparticles, Fe(NO3)3路9H2O and Fe3O4, for the growth of carbon nanotubes by Rapid Thermal Chemical Vapor Deposition. Selective deposition has been performed by means of an Electron Beam Lithography patterned PMMA mask. CH4 and H2 have been employed as process gases for the growth of carbon nanotubes. Catalyst nanoparticles and nanotubes have been characterized by SEM, AFM, and Raman spectroscopy. Results determine that we have grown Single Wall Carbon Nanotubes and small diameter Multi Wall Carbon Nanotubes on the catalyst deposited islands. We have also analyzed the effect of temperature and CH4:H2 ratio in the CVD process and compared our results to previously reported works.