Semiconductivity of pyrolyzed polymer for MEMS application

摘要

The paper deals with a pyrolyzed polymer as a kind of carbon material obtained by the pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O/sub 2/. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer MEMS structures. Polymer MEMS structures can be transformed into "pyrolyzed polymer MEMS" for various applications. This work focuses on the semiconductivity of a pyrolyzed polymer derived from popular polymer materials in MEMS. A measurement of the Hall effect provides information on the semiconductivity of pyrolyzed polymer. A diode is designed and demonstrated as the first step in the application of the semiconductive pyrolyzed polymer.