MEMS-based photonic bandgap (PBG) band-stop filter

摘要

A photonic bandgap (PBG) band-stop filter with flat response in a selected frequency band is designed in this paper. Two kinds of equivalent circuits for the proposed structure are derived and its parameters are extracted by using electromagnetic field software ADS. High resistivity silicon substrate and microelectromechanical systems (MEMS) surface micromachining process are employed. The measurement results revealed a 20 dB stop-band that has a width of 13.2 GHz, without ripples in the full band. The lower pass-band insertion loss is less than 2 dB and the higher pass-band insertion loss is less than 4.5 dB, without traces of ripples.