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Photoluminescence study of hexagonal GaN heteroepitaxial layers grown by molecular beam epitaxy on Al/sub 2/O/sub 3/, Si and GaAs substrates

机译:Al / sub 2 / O / sub 3 /,Si和GaAs衬底上通过分子束外延生长的六方GaN异质外延层的光致发光研究

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摘要

The low temperature photoluminescence (PL) characteristics of GaN thin films grown by radio-frequency plasma-assisted molecular beam epitaxy on Al/sub 2/O/sub 3/, GaAs and Si substrates have been investigated. A different dominating transition characterized the PL spectrum of each substrate type, indicating the significant role of the substrate in the control of the GaN epilayer's properties.
机译:研究了通过射频等离子体辅助分子束外延在Al / sub 2 / O / sub 3 /,GaAs和Si衬底上生长的GaN薄膜的低温光致发光(PL)特性。不同的主要过渡特征在于每种衬底类型的PL光谱,表明衬底在控制GaN外延层特性中的重要作用。

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