Taming the DFM beast into an adorable pet - a comprehensive approach

摘要

Summary form only given. Design for manufacturability, or DFM, strikes mortal fear in the heart of design and manufacturing communities. Relentless technology scaling coupled with an uncooperative lithography has begotten a significant DFM problem. Today, the scope of the problem has expanded to include not only functional yield and parametric yield, but manufacturing cost containment as well. Taming this DFM beast requires an orchestrated assault on multiple fronts.