Simulation technique of heating by contact resistance for ESD protection device

摘要

An appropriate treatment of the contact resistance in device simulation is presented for the purpose of studying thermal immunity of ESD protection devices. The technique presented allows the appropriate resistivity and power density to be provided at the contact. The validity of the power density around the contact is checked by Monte Carlo simulation. Using the technique, influence of the contact resistance on self-heating in an ESD protection device is simulated.