Electrical properties of organic thin films and surface analyses of ITO substrate for organic EL device

摘要

Organic electroluminescent devices are looked forward to as devices for next generation flat panel displays to replace liquid crystal and environmentally friendly light sources, and aggressive research and development on them is being conducted. As the organic electroluminescent devices have a multilayer structure depositing organic layers on ITO electrodes, it is surmised that the shape of the surface of the electrode has influences on electrical characteristics and emission characteristics of the device. In this research, in addition to observation of the shape of surface by AFM images of ITO electrodes deposited by vacuum deposition and sputtering and measurement of the state of element distribution and crystal structure, EL devices were prepared and measurement of electrical characteristics was conducted.