Some applications of a stereographic analysis of etching shapes for structures micromachined in singly and doubly rotated quartz plates

摘要

A stereographic analysis of 3D etching shapes is used to recognize rhombohedral faces limiting micromachined structures. Adjustment of the database is performed to generate for these faces extrema in the dissolution slowness. Theoretical shapes for microstructures derived from this new database am found to be in agreement with experiments.