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Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition processes

机译:轴向真空电弧等离子体流向径向流的转化及其在涂层沉积过程中的用途

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Radial filtered plasma flow formation in the annular gap between two oppositely directed rectilinear vacuum-arc erosion-plasma sources with magnetic focusing has been investigated. Studies were made into the impact of the parameters of the system (magnetic fields, substrate position) on the ion flow density and deposition rate distributions across the outlet annular opening between the anodes, and also on the roughness of the coatings obtained. As a result, the experiments have given the conditions which provide for coating deposition at a uniform rate over the whole width of the annular substrate surface with minimum plasma losses in the process of transformation of axial plasma flows into radial streams.
机译:研究了两个磁聚焦相反方向的直线真空弧腐蚀等离子体源之间的环形间隙中径向过滤等离子体流的形成。研究了系统参数(磁场,基材位置)对离子流密度和阳极之间出口环形开口上沉积速率分布的影响,以及对获得的涂层粗糙度的影响。结果,实验给出了在轴向等离子体流转化为径向流的过程中,以均匀的速率在环形基板表面的整个宽度上以最小的等离子体损失提供涂层沉积的条件。

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