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Polymer flip chip technology on flexible substrates-development and applications

机译:柔性基板上的聚合物倒装芯片技术-开发与应用

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Compared with classic solder flip chip technologies, the use of isotropic conductive adhesive for bumping and assembling results in a number of advantages such as a simple yet versatile process, lower temperatures and environmental friendliness. The polymer flip chip (PFC/sup TM/) technology requires suitable bond pads. The commonly used aluminum alloys result in unstable contacts for the conductive adhesives and hence there is an urgent need for an additional under-bump metallization for the PFC/sup TM/ technology. KSW Microtec has developed a technology which is based on electroless deposition of palladium. The metallization is executed as a back end process. The bond pads are deposited with a homogeneous and pin-hole free Pd thin film with a thickness of about 1 /spl mu/m without significant reduction of the Al bond pad metallization. The deposited film surface does not require flash gold metallization because of the noble characteristics of palladium. This simplifies the process in comparison to the well known Ni/Au process. The contact resistance between conductive adhesives and palladium metallization are equal to or better than gold/adhesive interconnections. As an example of the versatility of the PFC/sub TM/ technology, products manufactured by KSW Microtec include chip on dycostrate, chip on flex with screen printed polymer tracks, and smart cards. Experiences with the set-up and qualification of PFC/sup TM/ technology at KSW Microtec are also discussed.
机译:与传统的焊料倒装芯片技术相比,使用各向同性导电胶进行凸块和组装具有许多优势,例如简单但通用的工艺,较低的温度和环境友好性。聚合物倒装芯片(PFC / sup TM /)技术需要合适的焊盘。常用的铝合金会导致导电粘合剂的接触不稳定,因此迫切需要PFC / sup TM /技术的其他凸点下金属化。 KSW Microtec已开发出一种基于化学沉积钯的技术。金属化是作为后端过程执行的。用均匀且无针孔的Pd薄膜沉积焊盘,其厚度约为1 / splμm/ m,而不会显着减少Al焊盘的金属化。由于钯的高贵特性,所沉积的膜表面不需要快速镀金。与已知的Ni / Au工艺相比,这简化了工艺。导电粘合剂和钯金属化层之间的接触电阻等于或优于金/粘合剂互连。作为PFC / sub TM /技术多功能性的一个例子,由KSW Microtec制造的产品包括:在表面沉积的芯片,具有丝网印刷聚合物轨迹的柔性板上芯片以及智能卡。还讨论了在KSW Microtec上设置和鉴定PFC / sup TM /技术的经验。

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