Current status of the extended life source: lifetime and performance improvements

摘要

The Extended Lifetime Source (ELS) is an indirectly-heated cathode Bernas ion source originally designed for Eaten's high energy implanter, but is also used on GSD/200 high current and 8250P medium current tools. It features very long service lifetime in production, and enhanced multiply-charged performance. We present source lifetime data demonstrating a recent improvement of a factor of two in lifetime. Production lifetimes for a high energy triple-well implant chain and a high current chain are presented. We discuss fundamental ion source operation, showing different operating modes for generating B, BF/sub 2/, Sb, and Ge beams, and discuss the operation of the indirectly-heated cathode.