Silicon based replication technology of 3D-microstructures by conventional CD-injection molding techniques

摘要

A novel and rapid mass fabrication process for replicated polymeric 3D-microstructures of almost any arbitrary geometrical shape is presented. In this approach the master is fabricated using relatively inexpensive silicon bulk micromachining (wet or dry etching). This together with a slightly modified conventional CD-injection molding process can substantially reduce the production cycle times. The process was used to form microstructured replicas with micrometer precision and with structure depths down to 470 /spl mu/m at a cycle time less than 10 seconds.