Vacuum arc ion sources with gaseous plasma trigger systems

摘要

Triggering systems for vacuum arc plasma sources and ion sources have been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of trigger discharge configurations have been explored, a Penning discharge and a magnetron discharge. The approach works reliably for low gas pressure in the vacuum arc environment and for long periods of operation between required maintenance: pressures in the mid 10/sup -6/ Torr range and for /spl sim/10/sup 6/ pulses.