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Growth of thick CdTe films by close-space sublimation technique

机译:近距离升华技术生长厚CdTe薄膜

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High resistivity CdTe thick films (50 to 300 /spl mu/m) have been deposited by using close-space-sublimation technique with very high growth rate of about 5-10 /spl mu/m/min. In certain deposition conditions, bulk-like free-standing thick films are obtained. The resistivity of deposited films is in the order of 10/sup 10/ /spl Omega/m without any intentional doping. The current voltage characteristic shows a typical space charge limited behavior at bias voltages higher than 1 V. The effective hole mobility of 0.2 cm/sup 2//Vs is estimated. In addition, the films show clear photo-response to short laser pulse excitation, indicating feasibility for X-ray imaging devices.
机译:通过使用近空间升华技术以大约5-10 / spl mu / m / min的非常高的生长速率,已经沉积了高电阻率的CdTe厚膜(50至300 / spl mu / m)。在某些沉积条件下,可获得块状的自支撑厚膜。沉积膜的电阻率约为10 / sup 10 / splΩ/ m,无任何故意掺杂。当前的电压特性显示了在高于1 V的偏置电压下典型的空间电荷受限行为。估计的有效空穴迁移率为0.2 cm / sup 2 // Vs。另外,这些膜对短激光脉冲激发显示出清晰的光响应,表明了X射线成像设备的可行性。

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