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Surface Improvement Method For Controlling Oxidation Of Low Melting Point Metal -surface Improvement By Ge Implantation Into In Surface

机译：控制低熔点金属氧化的表面改进方法-锗注入表面的表面改进

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《》|2001年|P.240-243|共4页
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Kawakita; T.; Hatada; K.;
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中图分类无线电电子学、电信技术 ;
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4. Surface Improvement Method For Controlling Oxidation Of Low Melting Point Metal -surface Improvement By Ge Implantation Into In Surface [C] . Kawakita T., Hatada K., Institute of Electric and Electronic Engineer Joint International Electronic Manufacturing Symposium and the International Microelectronics Conference . 2001

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Surface Improvement Method For Controlling Oxidation Of Low Melting Point Metal -surface Improvement By Ge Implantation Into In Surface

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