Observation of vacuum ultraviolet Kr/sub 2/* laser oscillation pumped by a compact discharge device

摘要

Summary form only given. We have made the first observation of the VUV Kr/sub 2/* excimer laser pumped by a compact transverse discharge technique. We have paid a special attention for the following two points throughout the development; the preionization configuration to obtain self-sustained discharge as long as possible and the gas handling system to minimize the impurities in the gas. Other improvements on the stability of the discharge have been done according to the discharge physics and our experience. As a result, we have realized a stable self-sustained discharge of the high-pressure rare gases using a compact discharge device. The glow discharge was obtained even up to 10 atm of pure Kr. The VUV emission intensity centered at 148 nm abruptly increased when the charging voltage exceeded a certain value. In addition to this threshold behavior, a considerable spectral narrowing was observed when the charging voltage was increased. The deconvoluted spectral width was 0.5 nm (FWHM), which was much narrower than that of the spontaneous emission (13 nm). The abrupt increase of the VUV intensity and the significant spectral narrowing show a direct evidence of the onset of the stimulated emission at 148 nm.