Fabrication and characterization of spinel magnetic nanoparticle thin film transmission lines

摘要

Spinel magnetic nanoparticle thin films were fabricated on high resistivity silicon substrates. TRL (through-reflect-line) calibration standards for CPW lines were fabricated on samples of high resistivity silicon with and without the magnetic thin film. Measurements show an increase of approximately 0.3 in the effective combined dielectric/magnetic constant for a film thickness of 100 nm. Capacitors are fabricated to determine the relative permittivity of the thin film. The relative permeability is determined using comparisons of the measured effective dielectric/magnetic constant with simulated data.