A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT's)

摘要

The ability to calibrate an accelerometer after final assembly is an important improvement for high volume applications. We have developed a capacitive accelerometer which is trimmed using nonvolatile potentiometers. This trimming method as well as the short manufacturing steps of the sensor die reduce the overall costs further in an increasingly price sensitive market.