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Displacement measurement with submicron resolution using photo-electromotive force effect and frequency-modulated lasers

机译:使用光电动势效应和调频激光器以亚微米分辨率进行位移测量

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摘要

Two noncollinear coherent light waves interfering inside a semi-insulating semiconductor form an optical pattern (grating). Transient photoelectromotive force (photo-EMF) current can be generated when the phase of the grating is changed. Attractive features of the photo-EMF technique include ruggedness and comparative simplicity of system setup and signal processing. It has been successfully incorporated in vibrometry, displacement measurement, etc. We report a novel scheme for wide range and the high-resolution displacement measurement with photo-EMF effect that requires no moving component or complicated signal processing.
机译:干涉半绝缘半导体内部的两个非共线相干光波形成光学图案(光栅)。当光栅的相位改变时,可以产生瞬态光电势(photo-EMF)电流。光电动势技术的吸引人的特征包括坚固性以及系统设置和信号处理的相对简单性。它已成功地应用于振动测量,位移测量等领域。我们报告了一种新颖的方案,它具有光电动势的宽范围和高分辨率位移测量,不需要移动分量或复杂的信号处理。

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