As integrated sensors and microactuators are combined with embedded microcontrollers to form microsystems, there is an increasing need for highly-accurate interface circuits to provide the transducers with bus compatibility, programmable control, and self-test. Several readout circuits for capacitive sensors have been reported recently, including a generic interface that has been used extensively in a multi-element microsystem. This paper reports a bus-compatible interface chip that introduces several additional features, including a programmable mixed-signal mixed-voltage switched-capacitor (SC) read-out circuit with self-test and on-line calibration capabilities. This 4.5/spl times/4.5 mm/sup 2/ chip is in a 1 /spl mu/m n-well BiCMOS 2P/2M process with high-voltage CMOS, large-value resistor, and nonvolatile memory options.
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机译:由于集成的传感器和微执行器与嵌入式微控制器结合在一起形成微系统,因此越来越需要高精度的接口电路,以为换能器提供总线兼容性,可编程控制和自检功能。最近已经报道了几种用于电容式传感器的读出电路,包括已在多元件微系统中广泛使用的通用接口。本文报告了一种总线兼容的接口芯片,它引入了一些附加功能,包括具有自检和在线校准功能的可编程混合信号混合电压开关电容器(SC)读出电路。该4.5 / spl次/4.5 mm / sup 2 /芯片采用1 / splμ/ m n阱BiCMOS 2P / 2M工艺,具有高压CMOS,大阻值电阻和非易失性存储器选件。
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