Digital light processing (DLP)/sup TM/ based projection displays have come from introduction in an existing industry to undisputed dominance in some market sectors and a serious presence in all sectors in less than five years. At the heart of this line of products is a unique microelectromechanical structure (MEMS), the digital micromirror device (DMD)/sup TM/, developed at Texas Instruments. This presentation concentrates on a functional description of the DMD, including fabrication techniques, control strategy, and electromechanical modeling and performance.
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