The scanning tomographic acoustic microscope (STAM) is an advanced device capable of performing subsurface three-dimensional imaging of microscopic specimens. The resolution limits of this microscope in both range and cross-range are established using the spectral coverage technique. It is shown that the range resolution is a function of the acoustic wavelength, and the cross-range resolution is weakly dependent on the operating frequency. Experimental results are compared to theoretical values with complete agreement. Iterative algorithms for image enhancement are also examined. These algorithms are applied to experimental data to demonstrate their effectiveness.
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