Measurements of the Mueller matrix elements using a fully polarimetric optical scatterometer

摘要

The scattered or transmitted electromagnetic fields from a multilayered structure with irregular interfaces can be fully characterized by the Stokes vectors. The scattered or transmitted Stokes vectors are related to the incident Stokes vectors through the (4/spl times/4) Mueller matrix. The measurements of microwave or optical wave interactions with irregular multilayered structures have important civilian and military applications, such as in thin film analysis and in remote sensing. The TASC (True Angle Scatter Coordinate System) polarimetric scatterometer housed in the Center for Electro-optics at University of Nebraska-Lincoln can measure the 4/spl times/4 Mueller matrix as well as the BSDF (bi-directional scatter distribution functions) for scattered or transmitted light from a sample.