In this paper a theoretical and experimental investigation of the acoustic streaming that occurs in the fluid near a silicon-based, micromachined flexural plate wave (FPW) device is presented. A method of incorporating source boundary condition effects, which have been neglected in the past, into streaming theory is outlined briefly. This modified streaming theory is then applied to the problem in which the acoustic source is a thin plate with flexural waves traversing it. The source boundary effect in that case has a profound influence on the streaming flow, which is allowed to slip at the surface of the plate. Theoretical now profiles with velocity maxima of over 500 /spl mu/m/s agree well with those that are measured in FPW devices.
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机译：在本文中，对在硅基微机械弯曲板波（FPW）设备附近的流体中发生的声流进行了理论和实验研究。简要概述了一种将过去已被忽略的源边界条件效应纳入流理论的方法。然后，将这种改进的流理论应用于声源是一个薄板，挠曲波横穿的薄板的问题。在这种情况下，源边界效应对流的流动有深远的影响，使流在板的表面滑动。现在，速度最大值超过500 / spl mu / m / s的理论轮廓与FPW设备中测得的轮廓非常吻合。
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