Method for selecting semiconductor process equipment using empowered teams

摘要

A method is described for enabling self-managed teams of engineers to choose semiconductor process equipment for use in a new sub-half micron, 8" wafer fabrication facility. The selected equipment was required to meet the needs of process development and manufacturing. Process capability, manufacturability, impact on fab start up schedule, supplier support, capital cost, cost of ownership, and risk management issues were considered by the teams during the selection process.