Integrated micro-liquid dosing system

摘要

An integrated micro-liquid dosing system consisting of a micropump and a microliquid flow sensor is demonstrated. The dosing system allows accurate dosing of liquid in the microliter regime and can easily be integrated with components such as mixers and detectors in micro-liquid handling systems. The liquid pump is of the reciprocating type with a thermopneumatic actuator. The microliquid flow sensor is based on the thermal anemometer type. Both pump and flow sensor are realized in a 3-in