A CMOS piezoresistive pressure sensor with on-chip programming and calibration

摘要

A CMOS piezoresistive pressure sensor with on-chip programmable analog readout and calibration electronics is presented. The calibration network features a systematic compensation of first- and second-order temperature dependencies using digitally controlled sources. The piezoresistive full-bridge pressure sensor is located in the center of the chip, surrounded by the readout and compensation electronics. The bridge is on a thin diaphragm etched into the silicon substrate after completion of the standard n-well CMOS process. When exposed to pressure, deflection of the diaphragm causes changes in resistance and thus generates a voltage across the bridge.