Recent progress that has allowed the fabrication of silicon microsensors using procedures which are compatible with standard IC processes is reviewed. This will facilitate the integration of sensor and actuator units with their associated interface electronics, leading to microsystems. The importance of CAD (computer-aided design) is outlined. These developments are illustrated using examples of accelerometers, resonators, and chemical sensors. Some preliminary results of microsystems, especially regarding miniaturized chemical analysis systems, are discussed.
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