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An integrated high-resolution optical angular displacement sensor

机译:集成式高分辨率光学角位移传感器

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The sensor consists of a rotating element with reflective patterns fabricated onto it and a stationary part with optical detectors and readout circuitry, integrated in a standard BiFET IC process. High-resolution absolute angular position measurement is realized by combining the information of a high-resolution incremental analog sensor with that of a low-resolution absolute binary sensor. The high-resolution sensor part is implemented by a reflective zigzag pattern on the rotor and a position-sensitive device (PSD) on the stator. The low-resolution sensor part comprises a binary reflective code pattern on the rotor and a photodiode array on the stator. Angular displacement causes the code on the photodiode array to alternate and the reflected light spot on the PSD to move over the full length of the PSD in between each code transition. The sensor permits a contactless angular measurement over the full range of 360 degrees , without blocking at full scale. The sensor is insensitive to electric and magnetic fields and can be placed radially at any place on a rotating shaft.
机译:该传感器由一个旋转元件和一个固定部分组成,该旋转元件上装有反射图案,该固定元件带有光学检测器和读出电路,并以标准BiFET IC工艺集成。通过将高分辨率增量式模拟传感器的信息与低分辨率绝对二进制传感器的信息相结合,可以实现高分辨率绝对角位置测量。高分辨率传感器部分由转子上的反射锯齿形图案和定子上的位置敏感器件(PSD)组成。低分辨率传感器部分包括在转子上的二进制反射代码图案和在定子上的光电二极管阵列。角位移导致光电二极管阵列上的代码交替出现,并且PSD上的反射光斑在每次代码转换之间在PSD的整个长度上移动。该传感器允许在360度的整个范围内进行非接触式角度测量,而不会完全阻塞。该传感器对电场和磁场不敏感,可以径向放置在旋转轴上的任何位置。

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