A critical review based on experiments of the self-consistent modelling leading to the power balance equation of surface waves produced plasmas

摘要

Summary form only. The authors have been conducting an extensive experimental study on one of the key parameters of high-frequency discharges, theta , which represents the average power dissipated to maintain an electron-ion pair. A self-consistent model (coupling the wave and plasma equations) can be used to predict the observed behavior of theta , especially in regard to whether the similarity law theta /p versus pa is obeyed. However, a closer examination of the experimental results shows discrepancies that could be connected with the frequency dependence of the electron energy distribution function (EEDF). In this model, another important factor that reflects the EEDF is the effective collision frequency for momentum transfer, nu . Knowledge of both theta and nu allows the discharge to be modeled completely, since the axial distribution of the electron density can then be predicted. An effective electric field intensity value can be estimated from the observed theta and nu , and the behavior of the EEDF with frequency can be qualitatively deduced.