Single-step manufacturing process for the production of graphene-V/III LED heterostructures

摘要

Graphene has been touted as an ideal material for GaN LED transparent conductive layers due its high optical transparency and high electron mobility. However, many issues exist with graphene-LED integration. These include contamination from metal catalysts and manual transfer; graphene material non-uniformities over large (wafer-scale) areas; incompatibility with LED device processing; and high manufacturing costs for large-areas of material. In this work, we demonstrate graphene as a transparent contact layer for GaN LEDs which solves all of these issues. Our results prove zero contamination, with excellent material uniformity and full LED processing compatibility. Thus, we have for the first time shown a graphene fabrication process suitable for industrial GaN LED integration.