ENERGY PERFORMANCE OF CLEANROOM ENVIRONMENTAL SYSTEMS

摘要

By developing metrics for evaluating cleanroom air system performance and overall loadrnintensity, this paper provides energy benchmarking results for thirteen cleanroom environmental systemrnperformance, and identifies opportunities for improving cleanroom energy efficiency while maintainingrnor improving cleanroom contamination control. Comparisons with IEST Recommended Practice arernmade to examine the performance of cleanroom air systems. These results can serve as a vehicle tornidentify energy efficient cleanroom design practices and to highlight important issues in cleanroomrnoperation and maintenance. Results from this study confirm that there are opportunities in improvingrnenergy efficiency of cleanroom environmental systems while maintaining effective contaminationrncontrol.