Applications of excimer lasers in microelectronics

摘要

Abstract: Among the newly developed techniques for thin filmprocessing and semiconductor device fabrication, theexcimer laser is one of the most promising and powerfuldue to its usefulness for rapid thermal processing andsurface microstructure modification. To date, itsapplications in microelectronics include deep UVlithography, metal deposition and reflow, processmonitoring and diagnostics, laser repairing, and thinfilm processing including high temperaturesuperconductor material synthesis and laser enhancedchemical vapor deposition (CVD). In this paper, thestatus of semiconductor device metallization usingexcimers laser will be reviewed, and recent developmentin texturization of polycrystalline silicon thin films,silicide formation, and maskless patterning usingexcimer lasers will be presented.!21