Formation of reversible and irreversible structural defects on silicon surface under laser-pulsed influence

摘要

Abstract: cesses of the defects and the periodic structures formation on the silicon surface under the pulsed laser influence ($lambda $EQ 1.06 $mu@m, $tau $APEQ 1.5 msec, E$-L$/ $APEQ 3 J) have been studied. It has been shown that (1) at the energy densities F$-L$/ $LS F$-thres$/ (F$-thres$/ is the threshold energy density), formation of reversible defects took place, and at F$-L$/ $GRT F$-thres$/, irreversible defects appeared, (2) local melting of the surface started within the region where the defects formation occurred, (3) the periodic structures formation strongly depended on the mutual orientation vector of the crystallographic axes and the laser beam polarization.!8