Metal deep engraving with high average power femtosecond lasers

摘要

Deep engraving of 3D textures is a very demanding process for the creation of master tool e. g molds, forming tools or coining dies. As these masters are uses for reproduction of 3D patterns the materials for the tools are typically hard and brittle and thus difficult to machine. The new generation of industrial femtosecond lasers provides both high accuracy engraving results and high ablation rates at the same time. Operation at pulse energies of typically 40 μJ and repetition rates in the Mhz range the detrimental effect of heat accumulation has to be avoided. Therefore high scanning speeds are required to reduce the pulse overlap below 90%. As a consequence scan speeds in the range of 25-50 m/s a needed, which is beyond the capability of galvo scanners. In this paper we present results using a combination of a polygon scanner with a high average power femtosecond laser and compare this to results with conventional scanners. The effects of pulse energy and scan speed of the head on geometrical accuracy are discussed. The quality of the obtained structures is analyzed by means of 3D surface metrology microscope as well as SEM images.