Advanced Laser Techniques from Semiconductor Manufacturing Transition to Solar PV Production

摘要

For semiconductor manufacturing, a mature industry, a number of laser techniques are employed in production. Diode-pumped solid-state (DPSS) lasers are used in applications that cannot be performed by mechanical, chemical, or other laser fabrication methods as well as where they add value through increased throughput and/or improved process quality. Applications such as edge isolation, wafer scribing/dicing, via formation, laser doping and annealing for Semicon are being applied to crystalline silicon PV manufacture as well as research and development for the next generation of high efficiency cells. Similarly, selective material removal for exposing underlying layers without thermal damage is vital in the production of thin film PV panels. In this paper, some of the most important applications of lasers along with experimental results will be reviewed to illustrate how laser methods can have a significant impact on the development and productivity of the photovoltaic industry.