MEMS-based multiple fourier-horn silicon ultrasonic atomizer for inhalation drug delivery

摘要

Silicon-based centimeter-sized 1.0 – 2.0 MHz ultrasonic nozzles that employ multiple-Fourier horns and external liquid feeding have been realized to produce micrometer-sized (2.2 to 4.6µm) monodisperse droplets at high throughput (600µl/min) and low electrical drive power (<1 W). A preliminary battery-operated atomizer module has been constructed for inhalation drug delivery.