A High Optical Performance 3.4 μm Pixel Pitch Global Shutter CMOS Image Sensor with Light Guide Structure

摘要

We describe a high optical performance 3.4 μm pixel pitch global shutter CMOS image sensor with a light guidernstructure. The sensitivity and the parasitic light sensitivity are 28,000 e-/lx·s and -89 dB, respectively. Moreover, the incidentrnlight angle dependence of sensitivity and parasitic light sensitivity has been improved by the light guide structure. The pixelrnachieves 1.8 e- temporal noise and full well capacity of 16,200 e- with charge domain memory in 120 fps operation by multiplernaccumulation shutter technology.