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Approach to high-accuracy qualification of long-radius spherical surfaces (Invited Paper)

机译:长半径球面的高精度鉴定方法(邀请论文)

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Abstract: Techniques for absolute interferometric measurement ofsurface figure are often used for qualification ofspherical surfaces specified as $lambda@/20 PV orbetter. As the radius of curvature increases, thesetechniques become impractical due to the length ofcavity required, and environmental effects. Ourapproach has been to certify a reference surface with ashorter, i.e., manageable radius of curvature, and thento proceed through a series of measurements withsurfaces of increasing radius, while maintaining amanageable cavity length. At each stage, the`reference' data from the previous stage is subtractedfrom the new measurement in order to better approximatethe actual surface. The requirements of spatialregistration and image magnification are stringent ifone is to use the phase measured data directly. Thisprocess can be simplified if one uses a polynomial fitto the surface, e.g., Zernikes. The technique isdescribed for the qualification of a surface with an 8meter radius of curvature and is examined for sourcesof error. !6
机译:摘要:绝对干涉测量表面图形的技术通常用于鉴定球形表面,指定为$ lambda @ / 20 PV orbetter。随着曲率半径的增加,由于所需腔的长度以及环境影响,这些技术变得不切实际。我们的方法是对较短的参考表面(即可控制的曲率半径)进行认证,然后对半径增大的表面进行一系列测量,同时保持可控制的模腔长度。在每个阶段,都会从新测量中减去前一阶段的“参考”数据,以便更好地近似实际表面。如果要直接使用相位测量数据,对空间配准和图像放大的要求非常严格。如果使用多项式拟合表面(例如Zernikes),则可以简化此过程。描述了该技术用于鉴定曲率半径为8米的表面,并检查了误差来源。 !6

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