Abstract: The surface topography of various samples has been measured using an optical profiler and a scanning probe microscope (SPM). Optical profilers offer fast and accurate measurements of surface topography but are limited in their lateral resolution by the wavelength of light used. SPMs extend the lateral resolution down to atomic dimensions. Topography measurements are used to obtain surface roughness data. We find that for a scan size of 50 $MUL 50 $mu@m, the roughness data obtained from the optical profiler agree with the SPM measurements. The roughness data do not vary significantly when higher magnification images are taken with the SPM on surfaces that lack high frequency components. But for surfaces that have rough features that are smaller than the resolution of the optical profiler, roughness data calculated from higher magnification images by SPM can vary significantly. !2
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机译：摘要：已使用光学轮廓仪和扫描探针显微镜（SPM）测量了各种样品的表面形貌。光学轮廓仪提供了快速，准确的表面形貌测量，但其横向分辨率受到所用光波长的限制。 SPM将横向分辨率降低到原子尺寸。形貌测量用于获得表面粗糙度数据。我们发现，对于50 $ MUL 50 $ mu @ m的扫描大小，从光学轮廓仪获得的粗糙度数据与SPM测量结果一致。当在缺少高频成分的表面上用SPM拍摄更高放大倍率的图像时，粗糙度数据不会发生明显变化。但是对于具有小于光学轮廓仪分辨率的粗糙特征的表面，通过SPM从较高放大倍数图像计算出的粗糙度数据可能会发生很大变化。 ！2
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