Abstract: Soft-x-ray transmission multilayers have been designed and fabricated for use as polarizing elements. Polarization performance of the multilayers has been studied at a photon energy of 97 eV by rotating analyzer ellipsometry with a multilayer reflection polarizer. The transmission multilayers were found to be a good polarizer of 99.2% polarizance and a phase shifter of 90$DGR retardation with equal transmission ratio (5:3) and high throughput around 10%. !7
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