Determination of the optical constants and thickness of titanium oxidethin film by envelope method

摘要

Transparent titanium oxide thin film was deposited by DC reactive magnetron sputtering method onto glass slides and silicon wafer substrates. The film was characterized by AFM, XRD and spectrophotometer for film's thickness, crystallographic structure and transmission spectrum respectively. The film's thickness was, from AFM, found to be about 296 nm. XRD measurement shows that the film is crystallized in rutile phase. Absorption coefficient and the thickness of the films were calculated from interference of transmittance spectra. Optical constants such as refractive index (n) and extinction coefficient (k) were determined as a function of wavelength over the wavelength range from 400 to 800 nm using envelope methods.