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Study of A Nanocrystalline Diamond for Composite Diamond Windows in THz TWTs

机译:THz TWT中用于复合金刚石窗口的纳米晶金刚石的研究

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摘要

Previously we have developed an extremely thin composite diamond film for THz TWT windows by incorporating ultrananocrystalline diamonds (UNCDs) into microcrystalline diamonds (MCDs). Given that the processing conditions for UNCD differ from those of MCD, we investigated a process of nanocrystalline diamond (NCD) as an alternative to UNCD. This type of NCD is grown at relatively high substrate temperature (~8700C) under the same gas mixture (CH4/H2) as MCD that the fabrication processing can be facilitated. Testing results show that the fabricated NCD films have an average mechanical strength of $1565pm 88$ MPa, no less than UNCD.
机译:以前,我们通过将超纳米晶金刚石(UNCD)结合到微晶金刚石(MCD)中,为THz TWT窗开发了一种极薄的复合金刚石膜。鉴于UNCD的加工条件与MCD的加工条件不同,我们研究了纳米晶金刚石(NCD)替代UNCD的工艺。这种NCD在与MCD相同的混合气体(CH4 / H2)下,在较高的基板温度(〜8700C)下生长,可以简化制造过程。测试结果表明,制成的NCD薄膜的平均机械强度为\ n $1565\\pm 88 $ \ n MPa,不少于UNCD。

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  • 会议地点 Busan(KR)
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    National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing, 100015, China;

    National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing, 100015, China;

    National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing, 100015, China;

    National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing, 100015, China;

    National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing, 100015, China;

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